Станок для плазменной резки DIENER Tetra 100 Plasma system

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Marke: DIENER
2018 Tetra 100_LF-PC-c
The systems can be used for reactive ion etching. This allows surfaces to be etched precisely
both chemically and physically. The height accuracy of the etching depends on the process
but can usually be controlled quite precisely down to the low two-digit to single-digit nanometer range. The system also offers the option of depositing polymerizing gases in the plasma as thin films. The height precision is of course also dependent on the process. Typical values here are also in the low two-digit nanometer range
Operating hours Plasma system: 1004
Glanded pump: 644
The corrosive gas-resistant system has a special vacuum chamber measuring 400 mm x 625 mm x 400 mm (W x D x H). The vacuum chamber can be fully opened using an automated drawer. A holding frame for substrates is located vertically at the end of the drawer on the system side. It forms the counter electrode to the electrode in the vacuum chamber. Both electrodes are equipped with a cooling water circuit. Substrate holders with openings in the direction of the electrode can be mounted in the holding frame of the drawer. Samples that point towards the electrode through the openings in the holding frame can be treated in the plasma process. The remaining volume of the drawer is in a high vacuum during the process
but is not exposed to the plasma itself. The drawer also has flanges for inserting larger samples into the plasma chamber. Access to the drawer area is monitored by a safety system based on light barriers
The system is fully functional. It was put into operation briefly and once for test purposes in December 2023
Dimensions and weights if known
Plasma system Tetra 100_LF-PC-c
Dimensions (W x D x H) 600 mm x 1200 mm x 2100 mm
Weight: approx. 350 kg
Edwards iH1800 glanded pump
Dimensions: (L (to the housing of the exhaust system) x W x H (to the frequency converter))
986 (1059) mm x 470 mm x 888 (1094) mm
Rittal SK Chiller TopTherm (SK 3334.600)
Dimensions: (W x D x H) 602 mm x 645 mm x 676 mm
Weight / operating weight: 125 kg / 155 kg
Van Der Heijden mobile refrigerator (laboratory chiller) Type: 0000-A-KH-B400-TT-12-54-62
Dimensions: (W x D x H) 360 mm x 470 mm x 590 mm
Basic technical information on the plasma systems
Plasma system type Tetra 100 (Diener electronic Vertriebs GmbH + Co. KG)
corrosive gas version
Connection 400 V / 32 A
Full PC control with remote maintenance option via TeamViewer
Generator type A (80 kHz
0 -1000 W)
Electrode
water-cooled
aluminium
314 mm x 25 mm x 318 mm (W x D x H)
Special vacuum chamber
stainless steel
sight glasses at the rear
with drawer
automated and electrically driven
Dimensions W: 400 mm
D: 625 mm
H: 400 mm (volume: approx. 100 litres)
Water-cooled sample holder
incl. thermometer (integrated in control software)
Dosing for Silan A 174 (incl. heating cartridge
dosing unit
software integration
supply to chamber via separate gas inlet)
Pressure reducer for oxygen
noble gases (incl. inlet and outlet pressure gauges)
Pressure reducer SF6
C4F8
400 V Edwards iH1800 glanded pump
suction capacity 1800 m3/h
Rittal SK Chiller TopTherm (SK 3334.600)
Van Der Heijden mobile cooling unit (laboratory chiller) type: 0000-A-KH-B400-TT-12-54-62
setting range: -5°C - +25°C
Pump capacity max. 28 l/min
Activated charcoal filter KF 40
Software language: German
English
Hungarian
Operating instructions in German
Maintenance status
Last maintenance by manufacturer 18.10.2019 (annual maintenance cycle was cancelled due to subsequent system shutdown)
Spare parts supplied
1 x electrode
water-cooled
titanium
314 mm x 25 mm x 318 mm (W x D x H)
1 x electrode
water-cooled
stainless steel
314 mm x 25 mm x 318 mm (W x D x H)
as good as new
4 x holding bolt electrode
1 x substrate holder
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